An electrode configuration with microhollow array dielectric and anode was developed to obtain parallel vacuum arc discharge. Compared with the conventional electrodes, more than 10 parallel microhollow discharges were ignited for the new configuration, which increased the discharge area significantly and made the cathode eroded more uniformly. The vacuum discharge channel number could be increased effectively by decreasing the distances between holes or increasing the arc current. Experimental results revealed that plasmas ejected from the adjacent hollow and the relatively high arc voltage were two key factors leading to the parallel discharge. The characteristics of plasmas in the microhollow were investigated as well. The spectral line intensity and electron density of plasmas in microhollow increased obviously with the decease of the microhollow diameter.
