Silicone engineered anisotropic lithography for ultrahigh-density OLEDs

Abstract

Ultrahigh-resolution patterning with high-throughput and high-fidelity is highly in demand for expanding the potential of OLEDs. Here, the authors report that silicone-incorporated organic light-emitting semiconductors can achieve anisotropic lithography via reactive ion etching-coupled photolithography, for ultrahigh-density RGB OLED arrays.