Proceedings (Aug 2017)

Tuning the Anti-Phase Mode Sensitivity to Vibrations of a MEMS Gyroscope

  • Pierre Janioud,
  • Alexandra Koumela,
  • Christophe Poulain,
  • Patrice Rey,
  • Audrey Berthelot,
  • Panagiota Morfouli,
  • Guillaume Jourdan

DOI
https://doi.org/10.3390/proceedings1040355
Journal volume & issue
Vol. 1, no. 4
p. 355

Abstract

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This paper proposes a stiffness correction method to improve the resilience to vibration of a dual-mass MEMS gyroscope with a particular focus near the resonance frequency of the anti-phase drive mode (fDa), i.e., its operational mode. Because of its balanced shape, this operating mode is ideally insensitive to vibrations. However, fabrication imperfections generates a residual sensitivity to parasitic vibrations that can disturb normal operation of the sensor. This work shows that the application of a DC voltage (Vtr) at the drive actuation electrode enables to decrease this sensitivity by a factor of at least 30 because of the stiffness tuning of the dual-mass structure. Experiments are performed to confirm this assumption and an efficient stiffness correction method is proposed to improve device operation.

Keywords