Autostereoscopic-Raman Spectrometry-Based Three-Dimensional Metrology System for Measurements, Tracking and Identification in a Volume

Abstract

Three-dimensional compound measurement within a volume of interest is of great importance in industrial manufacturing and the biomedical field. However, there is no current method that can simultaneously perform spatial localization and 3D measurement in a non-scanning manner as well as the identification of material in a volume. In this paper, an Autostereoscopic-Raman Spectrometry-based (ARS) three-dimensional measurement system is proposed. The target object in a large depth range is initially positioned by the autostereoscopic 3D measurement method, and then the accurate position information is cross-checked and obtained by combining the spectral signal. Meanwhile, the spectral signal at the precise excitation position guided by the autostereoscopic signal also carries the material composition information. In order to verify the proposed ARS method, an associated measurement system was developed, and experimental studies of detecting various fibers of different depths in multi-layer glass structure were conducted. The spatial locations and dimensional information of multiple different targets can be measured in a volume, and their material can also be identified at the same time. The average error between the calculated position processed by the ARS system and the actual spatial position is within sub-micron levels, and the success rate of spectrum acquisition reaches 98%.

Keywords

• autostereoscopy
• Raman spectrometry
• three-dimensional measurement