Determination of the Electromagnetic Field on the Surface of the Beam Splitter of Laser Interferometer by Measuring the Displacements of Control Object Surfaces

Abstract

The paper describes in detail the governing relationships for the electromagnetic field on the surface of the laser beam splitter of a laser interferometer. These expressions are intended for numerical simulation of measuring the displacements of control object surfaces by using a laser interferometer. We consider the cases of perpendicular and parallel polarizations of the radiation source. Moreover, the most relevant particular cases of constructing optical circuits of the interferometer in question are treated. The presented theoretical results have been used in numerical studies of the functional characteristics of promising contactless optical means of measuring displacements. The use of the described results has improved the quality and informativeness of the numerical simulation results of the measurement process of displacements by a laser interferometer.

Keywords

• laser interferometer
• displacement measurement
• electromagnetic field
• perpendicular polarization
• parallel polarization