Optically controllable deformation and phase change in VO2/Si3N4/Au hybrid nanostructures with polarization selectivity
Xiaochen Zhang,
Yuan Li,
Weikang Dong,
Qinghua Liang,
Haozhe Sun,
Yang Wang,
Xiaowei Li,
Lan Jiang,
Xinping Zhang,
He Ma,
Jiafang Li
Affiliations
Xiaochen Zhang
Key Lab of Advanced Optoelectronic Quantum Architecture and Measurement (Ministry of Education), Beijing Key Lab of Nanophotonics and Ultrafine Optoelectronic Systems, and School of Physics, Beijing Institute of Technology, Beijing 100081, China
Yuan Li
Institute of Information Photonics Technology, Faculty of Science, Beijing University of Technology, Beijing 100124, China
Weikang Dong
Key Lab of Advanced Optoelectronic Quantum Architecture and Measurement (Ministry of Education), Beijing Key Lab of Nanophotonics and Ultrafine Optoelectronic Systems, and School of Physics, Beijing Institute of Technology, Beijing 100081, China
Qinghua Liang
Key Lab of Advanced Optoelectronic Quantum Architecture and Measurement (Ministry of Education), Beijing Key Lab of Nanophotonics and Ultrafine Optoelectronic Systems, and School of Physics, Beijing Institute of Technology, Beijing 100081, China
Haozhe Sun
Key Lab of Advanced Optoelectronic Quantum Architecture and Measurement (Ministry of Education), Beijing Key Lab of Nanophotonics and Ultrafine Optoelectronic Systems, and School of Physics, Beijing Institute of Technology, Beijing 100081, China
Yang Wang
Key Lab of Advanced Optoelectronic Quantum Architecture and Measurement (Ministry of Education), Beijing Key Lab of Nanophotonics and Ultrafine Optoelectronic Systems, and School of Physics, Beijing Institute of Technology, Beijing 100081, China
Xiaowei Li
Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China
Lan Jiang
Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China
Xinping Zhang
Institute of Information Photonics Technology, Faculty of Science, Beijing University of Technology, Beijing 100124, China
He Ma
Institute of Information Photonics Technology, Faculty of Science, Beijing University of Technology, Beijing 100124, China
Jiafang Li
Key Lab of Advanced Optoelectronic Quantum Architecture and Measurement (Ministry of Education), Beijing Key Lab of Nanophotonics and Ultrafine Optoelectronic Systems, and School of Physics, Beijing Institute of Technology, Beijing 100081, China
Optically spatial displacement and material modification hold great potential for the appealing applications in nanofabrication and reconfiguration of functional optical devices. Here, we propose and demonstrate a scheme to achieve simultaneous deformation and phase change in vanadium dioxide (VO2)/Si3N4/Au hybrid nanostructures by laser stimuli. Low triggering threshold and significant deformation characteristics of VO2, based on controllable phase transition, are demonstrated in microscale cantilevers. The plasmonic properties of the nanostructure array are further utilized to achieve a polarization-selective dynamic response. The persistence of deformation and dynamical optical modulation are further demonstrated. Such high-precision fabrication methods and non-contact reconfiguration methods are useful for future applications in dynamic optical manipulation.
