PERFORMANCE ANALYSIS OF COMPLIANT MECHANISM FOR MICRO POSITIONING STAGE

Abstract

Engineering applications are judged in today's fast-paced and intensely competitive industry based on exact and accurate results. Deflection of beams in compliant mechanisms is used to meet the growing needs for precision motion. Compliant mechanisms are referred to as a type of mechanism that is based on the mobility and rigidity of a component, allowing for increased precision without necessarily reducing its accuracy. Motion is achieved via molecular deformation combined with beam bending in the elastic zone. Compliant mechanisms are utilized in modern techniques for precision scanning, such as micro-nano processing microscopes and biological scanners. Major failures of compliant mechanisms are caused by repetitive in-plane and out-of-plane movement of compliant beams. This work presents an experimental and numerical analysis of a compliant mechanism utilized in biomedical scanners for linear motion in the XY direction. This study paper delves into the performance analysis of compliant mechanisms for various beam constraint positions and materials. The elastic deformation of the beam within the elastic zone of the material is totally responsible for the range of the motion and movement of the compliant mechanism in the XY direction. The maximum range of motion, stress, and stiffness values of XY Mechanism are used to determine the performance of a compliant mechanism. For various beam combinations, the compliant mechanism is examined.

Keywords

• precise motion
• compliant mechanisms
• bending stress
• different constraint positions