Компьютерная оптика (Dec 2019)

A microscope image processing method for analyzing TLIPSS structures

  • Dmitrij Belousov,
  • Alexander Dostovalov,
  • Victor Korolkov,
  • Sergey Mikerin

DOI
https://doi.org/10.18287/2412-6179-2019-43-6-936-945
Journal volume & issue
Vol. 43, no. 6
pp. 936 – 945

Abstract

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The paper describes a method for processing microimages of thermochemical laser-induced periodic surface structures (TLIPSS) to quantify their structural order and defects. Results of its application for the analysis of microimages of periodic structures formed in 30-nm chromium films by an astigmatically focused femtosecond Gaussian laser beam have been presented. Dependences of the relative area of the beam-modified region, the area of defects, and the ordering of the periodic structures on the scanning speed and the writing beam power have been obtained.

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