A Novel Large Travel, High Precision MEMS Based Electro-thermal Linear Actuator for Adjusting CCD Camera Lens

Abstract

In this paper, a linear micro actuator (LMA) with a stroke of 2.1 μm is designed and presented. Substrate, springy slider, and stopper are main parts of the LMA proposed. A large travel range can be achieved, by repeating the generated strokes. All simulations are done with ANSYS finite element. The springy slider, particularly and interestingly, can be deformed bidirectional either up-ward or down-ward. In fact, the slider creates such a linear deformation in one direction by electro-thermal stimulation. Without a stabilizer there is no value in even making such linear deformation. To stabilize and to prepare the slider for a large travel range, the four stoppers includes the springy clutches and electrostatic comb drives are used. The comb drives works with the electrostatic actuation and generates the propulsion forces required of the springy clutches. The clutches touches the side wall of the substrate to hold and stable the slider´s stroke. Combining the stroke of the slider and the stoppers operation, results a large travel range interestingly. The LMAs with large travel range are so important for different kinds of applications in micrometer scales. This LMA can push and pull the loady objects connected to the slider´s head accurately and can be used in adjusting CCD camera lens.

Keywords

• mems
• ccd camera lens
• the lma
• the slider
• the stopper
• stroke
• the clutch
• the electro-thermal actuators