Editorial for the Special Issue on Optical MEMS

Huikai Xie; Frederic Zamkotsian

doi:10.3390/mi10070458

Micromachines (Jul 2019)

Editorial for the Special Issue on Optical MEMS

Huikai Xie,
Frederic Zamkotsian

Affiliations

Huikai Xie: Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL 32611, USA
Frederic Zamkotsian: Aix Marseille Univ, CNRS, CNES, LAM, Laboratoire d’Astrophysique de Marseille, 38 rue Frederic Joliot Curie, 13388 Marseille CEDEX 13, France

DOI: https://doi.org/10.3390/mi10070458
Journal volume & issue: Vol. 10, no. 7
p. 458

Abstract

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Optical micro-electro-mechanical systems (MEMS), micro-opto-electro-mechanical systems (MOEMS), or optical microsystems are devices or systems that interact with light through actuation or sensing at a micron or millimeter scale [...]

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Published in Micromachines

ISSN: 2072-666X (Online)
Publisher: MDPI AG
Country of publisher: Switzerland
LCC subjects: Technology: Mechanical engineering and machinery
Website: https://www.mdpi.com/journal/micromachines

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Abstract

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