Miniature Fourier Transform Spectrometer Based on Thin-Film Lithium Niobate

Lichao Zhang; Guangyang Gou; Jiamin Chen; Wangzhe Li; Weichao Ma; Ruoming Li; Junming An; Yue Wang; Yuanyuan Liu; Wei Yan; Tianjun Ma; Chunxiu Liu; Jianjun Cheng; Zhimei Qi; Ning Xue

doi:10.3390/mi14020458

Micromachines (Feb 2023)

Miniature Fourier Transform Spectrometer Based on Thin-Film Lithium Niobate

Lichao Zhang,
Guangyang Gou,
Jiamin Chen,
Wangzhe Li,
Weichao Ma,
Ruoming Li,
Junming An,
Yue Wang,
Yuanyuan Liu,
Wei Yan,
Tianjun Ma,
Chunxiu Liu,
Jianjun Cheng,
Zhimei Qi,
Ning Xue

Affiliations

Lichao Zhang: State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China
Guangyang Gou: State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China
Jiamin Chen: State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China
Wangzhe Li: State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China
Weichao Ma: State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China
Ruoming Li: State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China
Junming An: Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
Yue Wang: Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
Yuanyuan Liu: Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
Wei Yan: Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
Tianjun Ma: State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China
Chunxiu Liu: State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China
Jianjun Cheng: School of Integrated Circuit, Quanzhou University of Information Engineering, Quanzhou 362000, China
Zhimei Qi: State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China
Ning Xue: State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China

DOI: https://doi.org/10.3390/mi14020458
Journal volume & issue: Vol. 14, no. 2
p. 458

Abstract

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A miniature Fourier transform spectrometer is proposed using a thin-film lithium niobate electro-optical modulator instead of the conventional modulator made by titanium diffusion in lithium niobate. The modulator was fabricated by a contact lithography process, and its voltage-length and optical waveguide loss were 2.26 V·cm and 1.01 dB/cm, respectively. Based on the wavelength dispersion of the half-wave voltage of the fabricated modulator, the emission spectrum of the input signal was retrieved by Fourier transform processing of the interferogram, and the analysis of the experimental data of monochromatic light shows that the proposed miniaturized FTS can effectively identify the input signal wavelength.

Published in Micromachines

ISSN: 2072-666X (Online)
Publisher: MDPI AG
Country of publisher: Switzerland
LCC subjects: Technology: Mechanical engineering and machinery
Website: https://www.mdpi.com/journal/micromachines

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Abstract

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