Micromachines
(Feb 2023)
Miniature Fourier Transform Spectrometer Based on Thin-Film Lithium Niobate
Lichao Zhang,
Guangyang Gou,
Jiamin Chen,
Wangzhe Li,
Weichao Ma,
Ruoming Li,
Junming An,
Yue Wang,
Yuanyuan Liu,
Wei Yan,
Tianjun Ma,
Chunxiu Liu,
Jianjun Cheng,
Zhimei Qi,
Ning Xue
Affiliations
Lichao Zhang
State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China
Guangyang Gou
State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China
Jiamin Chen
State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China
Wangzhe Li
State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China
Weichao Ma
State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China
Ruoming Li
State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China
Junming An
Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
Yue Wang
Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
Yuanyuan Liu
Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
Wei Yan
Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
Tianjun Ma
State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China
Chunxiu Liu
State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China
Jianjun Cheng
School of Integrated Circuit, Quanzhou University of Information Engineering, Quanzhou 362000, China
Zhimei Qi
State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China
Ning Xue
State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China
DOI
https://doi.org/10.3390/mi14020458
Journal volume & issue
Vol. 14,
no. 2
Abstract
Read online
A miniature Fourier transform spectrometer is proposed using a thin-film lithium niobate electro-optical modulator instead of the conventional modulator made by titanium diffusion in lithium niobate. The modulator was fabricated by a contact lithography process, and its voltage-length and optical waveguide loss were 2.26 V·cm and 1.01 dB/cm, respectively. Based on the wavelength dispersion of the half-wave voltage of the fabricated modulator, the emission spectrum of the input signal was retrieved by Fourier transform processing of the interferogram, and the analysis of the experimental data of monochromatic light shows that the proposed miniaturized FTS can effectively identify the input signal wavelength.
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