Periodic Scheduling Optimization for Dual-Arm Cluster Tools with Arm Task and Residency Time Constraints via Petri Net Model

Abstract

In order to improve quality assurance in wafer manufacturing, there are strict process requirements. Besides the well-known residency time constraints (RTCs), a dual-arm cluster tool also requires each robot arm to execute a specific set of tasks. We call such a tool an arm task-constrained dual-arm cluster tool (ATC-DACT). To do this, one of the arms is identified as the dirty one and the other as the clean one. The dirty one can deal with raw wafers, while the clean one can deal with processed wafers. This requirement raises a new problem for scheduling a cluster tool. This paper discusses the scheduling problem of ATC-DACTs with RTCs. Due to the arm task constraints, the proven, effective swap strategy is no longer applicable to ATC-DACTs, making the scheduling problem difficult. To address this problem, we explicitly describe the robot waiting as an event and build a Petri net (PN) model. Then, we propose a hybrid task sequence (HTS) as an operation strategy by combining the swap and backward strategies. Based on the HTS, the necessary and sufficient conditions for schedulability are established; also, a linear programming model is developed. We then develop an algorithm using these results to optimally schedule the system. Industrial case studies demonstrate the application of this method.

Keywords

• cluster tools
• Petri nets
• scheduling
• semiconductor manufacturing