New Volatile Tantalum Imido Precursors with Carboxamide Ligands

• Jeong Min Hwang,
• Sung Kwang Lee,
• Sunyoung Shin,
• Ji-Seoung Jeong,
• Hae Sun Kim,
• Ji Yeon Ryu,
• Taeyong Eom,
• Bo Keun Park,
• Chang Gyoun Kim,
• Taek-Mo Chung

Affiliations

Jeong Min Hwang

Thin Film Materials Research Center, Korea Research Institute of Chemical Technology, Daejeon, Republic of Korea

Sung Kwang Lee

Thin Film Materials Research Center, Korea Research Institute of Chemical Technology, Daejeon, Republic of Korea

Sunyoung Shin

Thin Film Materials Research Center, Korea Research Institute of Chemical Technology, Daejeon, Republic of Korea

Ji-Seoung Jeong

Thin Film Materials Research Center, Korea Research Institute of Chemical Technology, Daejeon, Republic of Korea

Hae Sun Kim

Thin Film Materials Research Center, Korea Research Institute of Chemical Technology, Daejeon, Republic of Korea

Ji Yeon Ryu

Thin Film Materials Research Center, Korea Research Institute of Chemical Technology, Daejeon, Republic of Korea

Taeyong Eom

Thin Film Materials Research Center, Korea Research Institute of Chemical Technology, Daejeon, Republic of Korea

Bo Keun Park

Thin Film Materials Research Center, Korea Research Institute of Chemical Technology, Daejeon, Republic of Korea

Chang Gyoun Kim

Thin Film Materials Research Center, Korea Research Institute of Chemical Technology, Daejeon, Republic of Korea

Taek-Mo Chung

Thin Film Materials Research Center, Korea Research Institute of Chemical Technology, Daejeon, Republic of Korea