Study of the Inhomogeneities of Overcompensed Silicon Samples Doped with Manganese

Abstract

Inhomogeneities in the near-surface region of diffusion-doped silicon with manganese atoms were studied using the local photo-EMF method and photovoltage and photoconductivity signals were detected. It has been established that the inhomogeneous region is located at a depth of 3÷35 μm from the surface of the crystal. The magnitude of photo-EMF in these layers does not change monotonically from point to point. It was revealed that the photo-EMF spectra depend on the wavelength of the irradiated light, while the shape of the areas and their shift are related to the penetration depth of laser radiation. The photo-EMF signal increases to a depth of ~25 µm from the surface, then saturates and from ~30 µm smoothly decreases and completely disappears at a depth of ~40 µm. The magnitude of the internal electric field was determined using the Tauc method. A model of the structure of the near-surface region of diffusion-doped silicon with manganese is proposed.

Keywords

• diffusion
• inclusion
• heat treatment
• inhomogeneity
• photo-emf
• photoprobe
• scattering
• gradient
• twin