Journal of Low Frequency Noise, Vibration and Active Control (Jun 2023)

The analysis for the dynamic pull-in of a micro-electromechanical system

  • Guang-Qing Feng,
  • Jing-Yan Niu

DOI
https://doi.org/10.1177/14613484221145588
Journal volume & issue
Vol. 42

Abstract

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The pull-in behavior is an inherent property of the micro-electromechanical oscillator. The bisection method and an iterative method are introduced to find its pull-in voltage, and the main factors affecting the pull-in voltage are elucidated. The simple and efficient operability is demonstrated through theoretical analysis and result comparison.