Journal of Low Frequency Noise, Vibration and Active Control (Jun 2023)
The analysis for the dynamic pull-in of a micro-electromechanical system
Abstract
The pull-in behavior is an inherent property of the micro-electromechanical oscillator. The bisection method and an iterative method are introduced to find its pull-in voltage, and the main factors affecting the pull-in voltage are elucidated. The simple and efficient operability is demonstrated through theoretical analysis and result comparison.