Numerical Analysis of Magnetized Sheath for Inner Surface Modification

Abstract

A fluid model of the magnetized sheath has been built using ion motion equation, ion continuity equation, Poisson's equation, and Boltzmann's relationship of electron for plasma-based low-energy ion implantation (PBLEII) inner surface modification of a tube. Along the central axis from the middle piece to the end, the maximum ion impact energy decreases from 1600 to 400 eV, the maximum ion impact angle increases from 7° to 60°, and an implantation dose peak of about twice as much as other place appears near the nozzle. The implantation dose just can compensate for the ion impact energy and angle because the mass transfer mechanism of PBLEII is thermal diffusion and low-energy ion implantation. The uniformity of the modification effect is acceptable along the axial direction of the tube.

Keywords

• Inner surface modification
• magnetized sheath
• fluid model
• plasma-based low-energy ion implantation (PBLEII)