The effect of the coupling radii of the elements of membrane MEMS systems on their own oscillations

Abstract

The regularities of changes in the frequencies and forms of natural oscillations and the stress state of a silicon sensing element of a mechanical MEMS accelerometer system depending on changes in the radii of rounding of structural elements are considered. An increase in the natural frequencies of the system and stresses in torsion suspensions has been established with an increase in the radii of the coupling of the suspension with the frame and the inertial mass. The rounding of the shape of the suspensions in the plan leads to a decrease in natural frequencies and an increase in stresses arising from oscillatory movements. The fact of localization of high-frequency oscillation forms in the inertial mass is confirmed. A set of design solutions is recommended to control the vibration state of the MEMS accelerometer mechanical system.

Keywords

• микроэлектромеханическая система
• акселерометр
• кремниевая пластина
• кремниевый торсионный подвес
• собственная частота
• форма колебаний
• напряжения