A unified global model accompanied with a voltage and current sensor for low-pressure capacitively coupled RF discharge

Abstract

A global model (GM) assumes ion energy ( $\varepsilon $ ) on the electrode equals the time-averaged sheath voltage ( ${\left\langle {V}_{{\rm{sh}}}\left(t\right)\right\rangle }_{t}$ ). However, using particle-in-cell simulation, we found that $\varepsilon $ differs from ${\left\langle {V}_{{\rm{sh}}}\left(t\right)\right\rangle }_{t}.$ We propose a unified global model (UGM) that calculates $\varepsilon $ and collisional energy losses of ions by employing plasma circuit and sheath models, accompanied by a voltage and current sensor. We compared the results of the UGM with the experimental measurements and the results revealed that UGM is closer to the experiment than GM. UGM shows a linear relationship with the experiment, indicating that the UGM is applicable for plasma monitoring.

Keywords

• plasma model
• unified global model
• global model
• plasma circuit model
• sheath model