The Development of a Dual-Warhead Impact System for Dynamic Linearity Measurement of a High-g Micro-Electro-Mechanical-Systems (MEMS) Accelerometer

Yunbo Shi; Zhicai Yang; Zongmin Ma; Huiliang Cao; Zhiwei Kou; Dan Zhi; Yanxiang Chen; Hengzhen Feng; Jun Liu

doi:10.3390/s16060840

Sensors (Jun 2016)

The Development of a Dual-Warhead Impact System for Dynamic Linearity Measurement of a High-g Micro-Electro-Mechanical-Systems (MEMS) Accelerometer

Yunbo Shi,
Zhicai Yang,
Zongmin Ma,
Huiliang Cao,
Zhiwei Kou,
Dan Zhi,
Yanxiang Chen,
Hengzhen Feng,
Jun Liu

Affiliations

Yunbo Shi: Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030000, Shanxi, China
Zhicai Yang: Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030000, Shanxi, China
Zongmin Ma: Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030000, Shanxi, China
Huiliang Cao: Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030000, Shanxi, China
Zhiwei Kou: Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030000, Shanxi, China
Dan Zhi: Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030000, Shanxi, China
Yanxiang Chen: Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030000, Shanxi, China
Hengzhen Feng: Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030000, Shanxi, China
Jun Liu: Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030000, Shanxi, China

DOI: https://doi.org/10.3390/s16060840
Journal volume & issue: Vol. 16, no. 6
p. 840

Abstract

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Despite its extreme significance, dynamic linearity measurement for high-g accelerometers has not been discussed experimentally in previous research. In this study, we developed a novel method using a dual-warhead Hopkinson bar to measure the dynamic linearity of a high-g acceleration sensor with a laser interference impact experiment. First, we theoretically determined that dynamic linearity is a performance indicator that can be used to assess the quality merits of high-g accelerometers and is the basis of the frequency response. We also found that the dynamic linearity of the dual-warhead Hopkinson bar without an accelerometer is 2.5% experimentally. Further, we verify that dynamic linearity of the accelerometer is 3.88% after calibrating the Hopkinson bar with the accelerometer. The results confirm the reliability and feasibility of measuring dynamic linearity for high-g accelerometers using this method.

Published in Sensors

ISSN: 1424-8220 (Online)
Publisher: MDPI AG
Country of publisher: Switzerland
LCC subjects: Technology: Chemical technology
Website: http://www.mdpi.com/journal/sensors

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