Development of a Novel Design and Modeling of MEMS Piezoelectric Cantilever-Based Chemical Sensors

Abstract

The analytical modeling of thin-film, multilayered piezoelectric microcantilevers is presented in this work. Piezoelectric microcantilevers were used in chemical sensors. Different types of probe coatings were applied to these types of microcantilevers. A position-sensitive sensor (PSS) system was used to identify chemical ingredients in materials with high sensitivity, and external voltage was measured in mV. The maximum voltage generated for the sensor was 39 mV. This range of voltage is suitable for sensing electronic systems. The angle change in a microcantilever in a liquid or gas environment identifies a material’s chemical ingredients. A microcantilever deflects, resulting in varying voltages in the analysis of materials. COMSOL software and equations were used for analytical simulations to determine the optimal design parameters. COMSOL software model development and MEMS design were involved in the analytical simulations. This paper examines an analytical model of the cantilever and discusses the fabrication process.

Keywords

• MEMS
• piezoelectric
• MEMS
• microcantilever
• COMSOL modeling and simulation
• chemical sensors