Advances in Radio Science (Sep 2012)

Broadband transitions for membrane-based coplanar waveguides on highly-conductive silicon substrates

  • M. Rohland,
  • U. Arz,
  • K. Kuhlmann,
  • S. Büttgenbach

DOI
https://doi.org/10.5194/ars-10-13-2012
Journal volume & issue
Vol. 10
pp. 13 – 18

Abstract

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We present a transition from a contact structure built on highly-conductive silicon to a coplanar waveguide (CPW) fabricated in membrane technology. Test structures were fabricated and measured. The silicon-to-membrane transition is suitable for on-wafer probing and provides less than −10 dB measured reflection in the frequency range from 1 to 110 GHz. Measured and calculated values of the propagation constant of the membrane CPW agree well in the entire frequency range.