Nature Communications (Apr 2022)

Bridging the gap between atomically thin semiconductors and metal leads

  • Xiangbin Cai,
  • Zefei Wu,
  • Xu Han,
  • Yong Chen,
  • Shuigang Xu,
  • Jiangxiazi Lin,
  • Tianyi Han,
  • Pingge He,
  • Xuemeng Feng,
  • Liheng An,
  • Run Shi,
  • Jingwei Wang,
  • Zhehan Ying,
  • Yuan Cai,
  • Mengyuan Hua,
  • Junwei Liu,
  • Ding Pan,
  • Chun Cheng,
  • Ning Wang

DOI
https://doi.org/10.1038/s41467-022-29449-4
Journal volume & issue
Vol. 13, no. 1
pp. 1 – 9

Abstract

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Barrier-free metal-semiconductor interfaces are crucial to improve the performance of 2D electronic devices. Here, the authors report a strategy to induce local bonding distortion in 2D transition metal dichalcogenides via soft oxygen plasma treatments, leading to reduced contact resistance and improved transport properties.