Sensors & Transducers (Jan 2015)

Temperature and Dilatation Estimation for Modern Semiconductor Devices

  • Eric JOUBERT,
  • Olivier LATRY,
  • Jean-Philippe ROUX

Journal volume & issue
Vol. 184, no. 1
pp. 130 – 135

Abstract

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This paper presents a new approach for measuring physical variables on micro- electronic components. An optical system is used to simultaneously quantify the surface temperature of a component and its expansion. This double acquisition is realized by a Michelson interferometer coupled with a Charge Coupled Device (CCD) line device. To validate this method, the temperature measurements were directly compared with the results obtained by an infrared camera and by a measurement of variation of I (V). The displacement measurements were compared with those obtained by a laser 3D vibrometer, whose physical principle is completely different. Consistent results were obtained regarding the different techniques.

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