Micro-lens Array Fabrication by Two Photon Polymerization Technology

Tien-Tung Chung; Yi-Ting Tu; Ya-Hsun Hsueh; Sheng-Yuan Chen; Wan-Jou Li

doi:10.5875/ausmt.v3i2.186

International Journal of Automation and Smart Technology (May 2013)

Micro-lens Array Fabrication by Two Photon Polymerization Technology

Tien-Tung Chung,
Yi-Ting Tu,
Ya-Hsun Hsueh,
Sheng-Yuan Chen,
Wan-Jou Li

Affiliations

Tien-Tung Chung: Department of Mechanical Engineering, National Taiwan University, Taiwan
Yi-Ting Tu: Department of Mechanical Engineering, National Taiwan University, Taiwan
Ya-Hsun Hsueh: Department of Mechanical Engineering, National Taiwan University, Taiwan
Sheng-Yuan Chen: Department of Mechanical Engineering, National Taiwan University, Taiwan
Wan-Jou Li: Department of Mechanical Engineering, National Taiwan University, Taiwan

DOI: https://doi.org/10.5875/ausmt.v3i2.186
Journal volume & issue: Vol. 3, no. 2
pp. 131 – 135

Abstract

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This paper presents the design and fabrication of micro-lens arrays (MLAs) by Two Photon Polymerization (TPP) technology. First, a computer program is developed to construct a solid MLA model with a specified focal length and lens diameter. A TPP laser scanning path for MLA fabrication is then generated. MLAs are fabricated by TPP, with quality assessed by SEM. Finally, good quality 5*5 MLA squares with dimensions 108*108 are successfully manufactured.

Published in International Journal of Automation and Smart Technology

ISSN: 2223-9766 (Online)
Publisher: Chinese Institute of Automation Engineers (CIAE) & Taiwan Smart Living Space Association (SMART LISA)
Country of publisher: Taiwan, Province of China
LCC subjects: Technology: Technology (General): Industrial engineering. Management engineering: Automation; Technology: Technology (General): Industrial engineering. Management engineering: Information technology
Website: https://www.ausmt.org/index.php/AUSMT/index

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