Ptychographic imaging of nanoscale 3D objects with soft x-ray synchrotron and EUV table-top sources

• Krasnov Vitaly,
• Dorney Kevin,
• Larsen Esben,
• Makhotkin Igor,
• Scheerder Jeroen,
• Soltwisch Victor,
• van der Heide Paul,
• Fleischmann Claudia

Affiliations

Krasnov Vitaly

imec / KU Leuven, Department of Physics and Astronomy, Quantum Solid-State Physics

Dorney Kevin

imec

Larsen Esben

imec

Makhotkin Igor

University of Twente

Scheerder Jeroen

imec

Soltwisch Victor

PTB

van der Heide Paul

imec

Fleischmann Claudia

imec / KU Leuven, Department of Physics and Astronomy, Quantum Solid-State Physics