AMR Sensor Array Design for the Realization of a 3D Magnetic Tactile Sensor

Abstract

The design of arrays of anisotropic magnetoresistive (AMR) sensors capable of detecting and reconstructing the 3D motion of a permanent magnet, and thus, suitable for the development of a 3D magnetic tactile sensor, is reported. The proposed structure allows for probing the 3D magnet displacements—and, hence, to infer the three components of the applied force—via a purely planar arrangement of monolithically microfabricated AMR sensors. The concept presented here also holds potential for the realization of a wide spectrum of easy-to-fabricate, miniaturized and low-cost sensors suitable for the detection of a broad variety of physical observables.

Keywords

• anisotropic magnetoresistance
• tactile sensing
• magnetic sensors
• micromagnetic simulations
• magnet system design