Micro and Nanotechnologies for Thermoelectric Generators

Abstract

This paper reviews the principles of thermoelectric energy harvesters and discusses the development of a new type of nanostructured thermoelectric generator, fabricated by combining silicon microfabrication techniques, electroplating and submicron ion-track nanolithography. Ion-track etched polyimide nanotemplates (30–100nm pore diameters) are used to grow Bi 2 Te 3 nanowires by electroplating. Microstructural and thermoelectric properties of Bi 2 Te 3 thin electroplated film are reported.