Bending 90° Waveguides in Nd:YAG Crystal Fabricated by a Combination of Femtosecond Laser Inscription and Precise Diamond Blade Dicing
Hao Zha,
Yicun Yao,
Minghong Wang,
Nankuang Chen,
Liqiang Zhang,
Chenglin Bai,
Tao Liu,
Yingying Ren,
Yuechen Jia
Affiliations
Hao Zha
School of Physics Sciences and Information Technology, Liaocheng University, Liaocheng 252000, China
Yicun Yao
School of Physics Sciences and Information Technology, Liaocheng University, Liaocheng 252000, China
Minghong Wang
School of Physics Sciences and Information Technology, Liaocheng University, Liaocheng 252000, China
Nankuang Chen
School of Physics Sciences and Information Technology, Liaocheng University, Liaocheng 252000, China
Liqiang Zhang
School of Physics Sciences and Information Technology, Liaocheng University, Liaocheng 252000, China
Chenglin Bai
School of Physics Sciences and Information Technology, Liaocheng University, Liaocheng 252000, China
Tao Liu
School of Electronic and Information Engineering, Qingdao University, Qingdao 266071, China
Yingying Ren
Center of Light Manipulations and Applications & Shandong Provincial Key Laboratory of Optics and Photonic Device, School of Physics and Electronics, Shandong Normal University, Jinan 250014, China
Yuechen Jia
State Key Laboratory of Crystal Materials, School of Physics, Shandong University, Jinan 250100, China
In this paper, a low-loss 90°-bending design in femtosecond laser-induced double-line waveguides is theoretically proposed and experimentally demonstrated. The bending is realized based on the total internal reflection of a corner mirror (made by precise diamond blade dicing) located at the intersection of a pair of waveguides perpendicular to each other. The waveguide bending performance was birefringence free, with the insertion loss of each bending below 0.8 dB. This method provides great flexibility and has great potential for the design of integrated photonics based on femtosecond laser-inscribed crystalline materials.
