Proceedings (Sep 2017)
A MEMS-Controllable Fresnel Zone Plate for Miniaturized UV Spectrometer
Abstract
This work presents the design and simulation of a MEMS-controllable linear motion Fresnel Zone Plate (FZP). The focal length of an FZP is a function of incident wavelength. This principle can be used for separating wavelengths, enabling a spectrometer application. The FZP of this work is designed on a linearly moving MEMS actuator, enabling wavelength focusing onto a fixed image plane. The FZP is designed with 400 zones, which can focus wavelengths from 150 nm to 410 nm by moving on a distance of 1 mm.
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