Sensitive and Low-Power Metal Oxide Gas Sensors with a Low-Cost Microelectromechanical Heater

• Yulong Chen,
• Mingjie Li,
• Wenjun Yan,
• Xin Zhuang,
• Kar Wei Ng,
• Xing Cheng

Affiliations

Yulong Chen

Department of Materials Science and Engineering, Southern University of Science and Technology, Shenzhen, People’s Republic of China

Mingjie Li

Department of Materials Science and Engineering, Southern University of Science and Technology, Shenzhen, People’s Republic of China

Wenjun Yan

School of Automation, Hangzhou Dianzi University, Hangzhou, People’s Republic of China

Xin Zhuang

Department of Materials Science and Engineering, Southern University of Science and Technology, Shenzhen, People’s Republic of China

Kar Wei Ng

Institute of Applied Physics and Materials Engineering, University of Macau, Macao, People’s Republic of China

Xing Cheng

Department of Materials Science and Engineering, Southern University of Science and Technology, Shenzhen, People’s Republic of China