Fiber-Optic Thermal Sensor for TiN Film Crack Monitoring

Hsiang-Chang Hsu; Tso-Sheng Hsieh; Yi-Chian Chen; Hung-En Chen; Liren Tsai; Chia-Chin Chiang

doi:10.3390/ma10111297

Materials (Nov 2017)

Fiber-Optic Thermal Sensor for TiN Film Crack Monitoring

Hsiang-Chang Hsu,
Tso-Sheng Hsieh,
Yi-Chian Chen,
Hung-En Chen,
Liren Tsai,
Chia-Chin Chiang

Affiliations

Hsiang-Chang Hsu: Department of Mechanical Engineering, National Kaohsiung University of Applied Sciences, Kaohsiung 807, Taiwan
Tso-Sheng Hsieh: Department of Industrial Engineering and Management, Fortune Institute of Technology, Kaohsiung 831, Taiwan
Yi-Chian Chen: Department of Mechanical Engineering, National Kaohsiung University of Applied Sciences, Kaohsiung 807, Taiwan
Hung-En Chen: Department of Mechanical Engineering, Wu Feng University, Chiayi County 62153, Taiwan
Liren Tsai: Department of Mechanical Engineering, National Kaohsiung University of Applied Sciences, Kaohsiung 807, Taiwan
Chia-Chin Chiang: Department of Mechanical Engineering, National Kaohsiung University of Applied Sciences, Kaohsiung 807, Taiwan

DOI: https://doi.org/10.3390/ma10111297
Journal volume & issue: Vol. 10, no. 11
p. 1297

Abstract

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The study focuses on the thermal and temperature sensitivity behavior of an optical fiber sensor device. In this article, a titanium nitride (TiN)-coated fiber Bragg grating (FBG) sensor fabricated using an ion beam sputtering system was investigated. The reflection spectra of the FBG sensor were tested using R-soft optical software to simulate the refractive index sensitivity. In these experiments, the temperature sensitivity of the TiN FBG was measured at temperatures ranging from 100 to 500 °C using an optical spectrum analyzer (OSA). The results showed that the temperature sensitivity of the proposed TiN FBG sensor reached 12.8 pm/°C for the temperature range of 100 to 300 °C and 20.8 pm/°C for the temperature range of 300 to 500 °C. Additionally, we found that the produced oxidation at temperatures of 400-500 °C caused a crack, with the crack becoming more and more obvious at higher and higher temperatures.

Published in Materials

ISSN: 1996-1944 (Online)
Publisher: MDPI AG
Country of publisher: Switzerland
LCC subjects: Technology: Electrical engineering. Electronics. Nuclear engineering; Technology: Engineering (General). Civil engineering (General); Science: Natural history (General): Microscopy; Science: Physics: Descriptive and experimental mechanics
Website: http://www.mdpi.com/journal/materials/

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