Modeling of Microdiaphragm Based Pressure Sensor with Application for Gas Turbine Engine Condition Monitoring

Abstract

The miniaturization of sensors represents a promising approach for various systems health management. Dynamic pressure measurements have a very good potential to provide GTE diagnostics, maintenance management, and optimized performance, based on pressure variation measurements. In this paper, we will investigate vibrational behavior of piezoelectric microdiaphragm based pressure sensor with application for GTEs condition monitoring. The general formulation based on transverse vibration of circular plates will be introduced and the response of diaphragm under forced excitation will be discussed. The obtained results show that the application of pressure sensor for condition monitoring of GTEs could have major benefits and improve their performance.

Keywords

• MEMS
• Pressure sensor
• Piezoelectric
• GTEs
• Condition monitoring
• Transverse vibration
• Circular microdiaphragm