Lab-on-Chip for Everyone: Introducing an Electronic-Photonic Platform for Multiparametric Biosensing Using Standard CMOS Processes

Abstract

The recent pandemic has shown that accurate and on-demand information on various infections requires highly versatile, Point-of-Care (PoC) platforms providing diagnostic and prognostic multiparametric information, personalized to each patient. Despite the significant progress made over the last years in various biosensing technologies, existing solutions fail to meet the power and area requirements needed for highly scalable and portable next-generation PoC devices. This work presents a solution based on a first of its kind fully integrated electronic-photonic platform in a zero-change high volume CMOS-SOI process, tailored towards molecular and ultrasound sensing applications. Leveraging co-integration of $10\mu \text{m}$ micro-ring resonators (MRRs) with on-chip electronics, we address the current needs of scalability, power and area by providing nanophotonic sensing and readout processing on a monolithic electronic-photonic system-on-chip (EPSoC). This work unlocks the door towards complete and self-contained Lab-on-Chip (LoC) systems, capable of providing multiparametric biosensing information.

Keywords

• CMOS-SOI
• lab-on-chip
• label-free
• microring resonator
• molecular sensing
• ultrasound imaging