Nanoscale Research Letters (Feb 2021)

A Biaxial Strain Sensor Using a Single MoS2 Grating

  • Junxiang Xiang,
  • Wenhui Wang,
  • Lantian Feng,
  • Chao Feng,
  • Meng Huang,
  • Ping Liu,
  • XiFeng Ren,
  • Bin Xiang

DOI
https://doi.org/10.1186/s11671-021-03493-3
Journal volume & issue
Vol. 16, no. 1
pp. 1 – 7

Abstract

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Abstract In this paper, we report a new type of MoS2-based grating sensor for in-plane biaxial strain gauges with a precision limit of ~ 1‰. The MoS2 grating is numerically simulated with different biaxial strains up to 5%. Our first-principles calculations reveal that the strain sensitivity of the MoS2 reflectance spectrum can be considered an additional strain sensor integrated with the grating structure, enabling the mapping of in-plane biaxial strains. Our experimental studies on a prototype MoS2-grating sensor further confirm that a strain component perpendicular to the grating period can cause intensity peak shifts in the grating’s first-order diffraction patterns. This work opens a new path towards the sensing of in-plane biaxial strain within a single-grating device. Our new approach is applicable for other materials that have predictable reflectance response under biaxial strains and the capacity to form a two-dimensional single-crystal layer.

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