Deformation monitoring is one of the most mature applications of space-borne InSAR technique. Firstly, we introduce the basic principle of InSAR in the monitoring of deformation and the current SAR satellites. The deformation monitoring methods of InSAR are then classified into the groups of D-InSAR, PS-InSAR, SBAS-InSAR, DS-InSAR and MAI, which are analyzed in the aspects of technical features and application scopes. Subsequently, we analyze the research progress and deficiencies of InSAR in the investigation of urban, mining area, earthquake, volcano, infrastructure, glacier, permafrost and landslide. Finally, some advanced academic problems such as deformation monitoring in multi-demension and low coherence area, atmospheric and orbital errors mitigation, and accuracy assessment are concluded.