A variable optical attenuator (VOA) is a crucial component for optical communication, especially for a variable multiplexer (VMUX) and reconfigurable optical add-drop multiplexer (ROADM). With the capacity increasing dramatically, a large-port-count and low-power-consumption VOA array is urgent for an on-chip system. In this paper, we experimentally demonstrate a 16-channel VOA array based on a polymer/silica hybrid waveguide. The proposed array is able to work over C and L bands. The VOA array shows an average attenuation larger than 14.38 dB with a low power consumption of 15.53 mW. The low power consumption makes it possible to integrate silica-based passive devices with a large port count on-chip.
