Design, Assembly, and Simulation of Flexure-Based Modular Micro-Positioning Stages

Abstract

With flexure-based micro-positioning stages (MPSs) being in high demand for high-precision applications, the performance and cost of flexure-based MPSs are two issues that urgently need to be addressed. In addition, the current MPSs are being developed toward complex spatial configurations, which further precludes monolithic fabrication. To address the aforementioned issues, modular MPSs using designed standardized modules are introduced in this paper. Firstly, the motivations are described, followed by the modular design. In addition, a new assembly concept analogy with composing compounds is proposed for guiding module assembly, including some proposed planar and spatial configurations. For validation, the static and dynamic performances of modular MPSs with respect to different modules and materials are presented as case studies. The proposed modular MPSs can provide better flexibility and functionality for further applications.

Keywords

• modular architecture
• micro-positioning stage
• decoupled stage
• parallel mechanism