Sensors (May 2022)

Self-Powered and Autonomous Vibrational Wake-Up System Based on Triboelectric Nanogenerators and MEMS Switch

  • Yuan Lin,
  • Youchao Qi,
  • Jiaqi Wang,
  • Guoxu Liu,
  • Zhaozheng Wang,
  • Junqing Zhao,
  • Yi Lv,
  • Zhi Zhang,
  • Ning Tian,
  • Mengbi Wang,
  • Yuanfen Chen,
  • Chi Zhang

DOI
https://doi.org/10.3390/s22103752
Journal volume & issue
Vol. 22, no. 10
p. 3752

Abstract

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With the extensive application of wireless sensing nodes, the demand for sustainable energy in unattended environments is increasing. Here, we report a self-powered and autonomous vibrational wake-up system (SAVWS) based on triboelectric nanogenerators and micro-electromechanical system (MEMS) switches. The energy triboelectric nanogenerator (E-TENG) harvests vibration energy to power the wireless transmitter through a MEMS switch. The signal triboelectric nanogenerator (S-TENG) controls the state of the MEMS switch as a self-powered accelerometer and shows good linearity in the acceleration range of 1–4.5 m/s2 at 30 Hz with a sensitivity of about 14.6 V/(m/s2). When the acceleration increases, the S-TENG turns on the MEMS switch, and the wireless transmitter transmits an alarm signal with the energy from E-TENG, using only 0.64 mJ. Using TENGs simultaneously as an energy source and a sensor, the SAVWS provides a self-powered vibration monitoring solution for unattended environments and shows extensive applications and great promise in smart factories, autonomous driving, and the Internet of Things.

Keywords