Sensitive Element of Microaccelerometer on Surface Acoustic Waves for Measuremant of Superhigh Accelerations

Abstract

The article presents the main shortcomings of the sensitive element of the micromechanical accelerometer on surface acoustic waves, developed earlier at the Department of Laser Measuring and Navigation Systems ETU. Solutions for elimination of deficiencies are offered. The merits of the proposed design of a sensitive element for measuring super large accelerations are described. The strength of the materials and the design of the sensitive element was evaluated.

Keywords

• Micromechanical accelerometer
• surface acoustic waves
• sensitive element