Dependence of boron incorporation in delta layers on CVD diamond growth process and misorientation angle

• Lobaev M.A.,
• Gorbachev A.M.,
• Vikharev A.L.,
• Radishev D.B.,
• Isaev V.A.,
• Bogdanov S.A.,
• Yunin P.A.,
• Drozdov M.N.,
• Butler J.E.

Affiliations

Lobaev M.A.

Institute of Applied Physics of the Russian Academy of Sciences

Gorbachev A.M.

Institute of Applied Physics of the Russian Academy of Sciences

Vikharev A.L.

Institute of Applied Physics of the Russian Academy of Sciences

Radishev D.B.

Institute of Applied Physics of the Russian Academy of Sciences

Isaev V.A.

Institute of Applied Physics of the Russian Academy of Sciences

Bogdanov S.A.

Institute of Applied Physics of the Russian Academy of Sciences

Yunin P.A.

Institute for Physics of Microstructures of the Russian Academy of Sciences

Drozdov M.N.

Institute for Physics of Microstructures of the Russian Academy of Sciences

Butler J.E.

Institute of Applied Physics of the Russian Academy of Sciences