Controlled Growth of WO₃ Pyramidal Thin Film via Hot-Filament Chemical Vapor Deposition: Electrochemical Detection of Ethylenediamine

Abstract

In this work, the structural, optical, morphological, and sensing features of tungsten oxide (WO3) thin film deposited on a silicon substrate via hot-filament chemical vapor deposition (HFCVD) are described. The experimental characterization tools, such as X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), ultraviolet-visible (UV-Vis), and Fourier transform infra-red (FTIR) spectroscopies, etc., were used to determine the properties of WO3 NPys thin films. The grown WO3 thin film illustrated closely packed porous pyramidal nanostructures (NPys) of improved grain size properties. The diffraction analysis revealed (100) and (200) of WO3 phases, suggesting the classic monoclinic crystal WO3 structure. HFCVD grown WO3 NPys thin film was employed as electro-active electrode for detecting ethylenediamine in 10 mL of 0.1 M phosphate buffer solution (PBS) by varying the ethylenediamine concentrations from 10 μM to 200 μM at room temperature. With a detection of limit (LOD) of ~9.56 μM, and a quick reaction time (10 s), the constructed chemical sensor achieved a high sensitivity of ~161.33 μA μM−1 cm−2. The durability test displayed an excellent stability of electrochemical sensor by maintaining over 90% sensitivity after 4 weeks of operation. This work provides a strategy for a facile preparation of WO3 NPys thin film electrode for sensor applications.

Keywords

• WO₃
• thin films
• HFCVD
• nanopyramids
• ethylenediamine
• chemical sensor