Calcination-Enhanced Laser-Induced Damage Threshold of 3D Micro-Optics Made with Laser Multi-Photon Lithography

Abstract

Laser Direct Writing (LDW), also known as 3D multi-photon laser lithography of resins, is a promising technique for fabricating complex free-form elements, including micro-optical functional components. Regular organic or hybrid (organic–inorganic) resins are often used, with the latter exhibiting better optical characteristics, as well as having the option to be heat-treated into inorganic glass-like structures particularly useful for resilient micro-optics. This work is a continuation of our SZ2080™ calcination development of micro-optics, specifically studying the Laser-Induced Damage Threshold (LIDT). Such sol–gel-derived glass 3D micro-structures, particularly those that undergo heat treatment, have not been well-characterized in this respect. In this pilot study, we investigated the LIDT using the Series-on-One (S-on-1) protocol of functional micro-lenses produced via LDW and subsequently calcinated. Our results demonstrate that the LIDT can be significantly increased, even multiple times, by this approach, thus enhancing the resilience and usefulness of these free-form micro-optics. This work represents the first investigation in terms of LIDT into the impact of calcination on LDW-produced, sol–gel-derived glass micro-structures and provides important insights for the development of robust micro-optical devices.

Keywords

• laser-induced damage threshold (LIDT)
• 3D micro-optics
• laser direct writing
• multi-photon lithography
• SZ2080™
• calcination