Nonlinear Etch Rate of Au-Assisted Chemical Etching of Silicon

• Keorock Choi,
• Yunwon Song,
• Bugeun Ki,
• Jungwoo Oh

Affiliations

Keorock Choi

School of Integrated Technology, Yonsei University, Incheon, Republic of Korea

Yunwon Song

School of Integrated Technology, Yonsei University, Incheon, Republic of Korea

Bugeun Ki

School of Integrated Technology, Yonsei University, Incheon, Republic of Korea

Jungwoo Oh

School of Integrated Technology, Yonsei University, Incheon, Republic of Korea