Micromachines (May 2021)

Macro Modeling of V-Shaped Electro-Thermal MEMS Actuator with Human Error Factor

  • Dongpeng Zhang,
  • Anjiang Cai,
  • Yulong Zhao,
  • Tengjiang Hu

DOI
https://doi.org/10.3390/mi12060622
Journal volume & issue
Vol. 12, no. 6
p. 622

Abstract

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The V-shaped electro-thermal MEMS actuator model, with the human error factor taken into account, is presented in this paper through the cascading ANSYS simulation model and the Fuzzy mathematics calculation model. The Fuzzy mathematics calculation model introduces the human error factor into the MEMS actuator model by using the BP neural network, which effectively reduces the error between ANSYS simulation results and experimental results to less than 1%. Meanwhile, the V-shaped electro-thermal MEMS actuator model, with the human error factor included, will become more accurate as the database of the V-shaped electro-thermal actuator model grows.

Keywords