Micromachines (Feb 2024)

Editorial for the Special Issue on State-of-the-Art CMOS and MEMS Devices

  • Zhiming Chen

DOI
https://doi.org/10.3390/mi15030327
Journal volume & issue
Vol. 15, no. 3
p. 327

Abstract

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Complementary Metal Oxide Semiconductor (CMOS) and Micro-Electro-Mechanical System (MEMS) devices play significant roles in emerging research fields such as artificial intelligence (AI) [...]

Keywords