Applied Sciences (Feb 2023)

Evaluation of the Structural, Optical and Photoconversion Efficiency of ZnO Thin Films Prepared Using Aerosol Deposition

  • May Zin Toe,
  • Wai Kian Tan,
  • Hiroyuki Muto,
  • Go Kawamura,
  • Atsunori Matsuda,
  • Swee-Yong Pung

DOI
https://doi.org/10.3390/app13031905
Journal volume & issue
Vol. 13, no. 3
p. 1905

Abstract

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As compared to other deposition techniques such as atomic layer deposition, chemical vapour deposition and sputtering, aerosol deposition (AD) is a simple and cost-effective technique to produce ZnO thin films. In this work, the effect of deposition cycles on the structural, optical, and photo-conversion efficiency (PCE) of dye sensitized solar cells of ZnO thin films deposited by AD (AZ) was systematically studied. The structural, optical, and PCE% of two-cycle deposited ZnO thin film (AZ-II) exhibited the highest performance. Further increment in deposition cycle caused deterioration in the structural, optical, and PCE performance. The thickness of ZnO thin films decreased due to abrasion of the deposited film by the subsequent stream of highly energetic ZnO particles. Loosely bound particles could be found on the surface of ZnO thin film after three deposition cycles (AZ-III). The AZ-III films exhibited poor crystal quality, with many crystal defects such as interstitial oxygen as suggested in room temperature photoluminescence analysis.

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