A Novel Fabricating Method of Micro Lens-on-Lens Arrays with Two Focal Lengths

Abstract

Micro lens-on-lens array (MLLA) is a novel 3D structure with unique optical properties that cannot be fabricated accurately and quickly by existing processing methods. In this paper, a new fabricating method of MLLAs with two focal lengths is proposed. By introducing the soft lithography technology, nano-imprint technology and mask alignment exposure technology, MLLAs with high precisions can be obtained. A MLLA is successfully fabricated with two focal lengths of 58 μm and 344 μm, and an experiment is carried out. The results show that the MLLA has excellent two-level focusing and imaging abilities. Furthermore, the fabricated profiles of the MLLA agree well with the designed profiles, and the morphology deviation of the MLLA is better than 2%, satisfying the application requirements. The results verify the feasibility and validity of the novel fabricating method. By adjusting mask patterns and processing parameters, MLLAs with both changeable sizes and focal lengths can be obtained.

Keywords

• microlens arrays
• micro lens-on-lens arrays
• photoresist reflow method
• soft lithography
• nano-imprint technology
• mask alignment exposure technology