Nature Communications (Mar 2020)
A FinFET with one atomic layer channel
- Mao-Lin Chen,
- Xingdan Sun,
- Hang Liu,
- Hanwen Wang,
- Qianbing Zhu,
- Shasha Wang,
- Haifeng Du,
- Baojuan Dong,
- Jing Zhang,
- Yun Sun,
- Song Qiu,
- Thomas Alava,
- Song Liu,
- Dong-Ming Sun,
- Zheng Han
Affiliations
- Mao-Lin Chen
- Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences
- Xingdan Sun
- Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences
- Hang Liu
- Institute of Chemical Biology and Nanomedicine, State Key Laboratory of Chemo/Biosensing and Chemometrics, College of Chemistry and Chemical Engineering, Hunan University
- Hanwen Wang
- Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences
- Qianbing Zhu
- Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences
- Shasha Wang
- Anhui Key Laboratory of Condensed Matter Physics at Extreme Conditions, High Magnetic Field Laboratory and University of Science and Technology of China, Chinese Academy of Science (CAS)
- Haifeng Du
- Anhui Key Laboratory of Condensed Matter Physics at Extreme Conditions, High Magnetic Field Laboratory and University of Science and Technology of China, Chinese Academy of Science (CAS)
- Baojuan Dong
- State Key Laboratory of Quantum Optics and Quantum Optics Devices, Institute of Opto-Electronics, Shanxi University
- Jing Zhang
- State Key Laboratory of Quantum Optics and Quantum Optics Devices, Institute of Opto-Electronics, Shanxi University
- Yun Sun
- Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences
- Song Qiu
- Key Laboratory of Nanodevices and Applications, Suzhou Institute of Nanotech and Nanobionics, Chinese Academy of Science
- Thomas Alava
- Université Grenoble Alpes, CEA, LETI
- Song Liu
- Institute of Chemical Biology and Nanomedicine, State Key Laboratory of Chemo/Biosensing and Chemometrics, College of Chemistry and Chemical Engineering, Hunan University
- Dong-Ming Sun
- Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences
- Zheng Han
- Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences
- DOI
- https://doi.org/10.1038/s41467-020-15096-0
- Journal volume & issue
-
Vol. 11,
no. 1
pp. 1 – 7
Abstract
FinFETs are an evolution of metal-oxide-semiconductor field effect transistors (MOSFETs) featuring a semiconducting channel vertically wrapped by conformal gate electrodes. Here, the authors use a two-dimensional semiconductor to push the FinFET width to sub-nm whilst achieving a 107 ON/OFF ratio.
