Investigation of Field Emission Properties of Carbon Nanotube Arrays of Different Morphologies

Abstract

This article presents, for the first time, a comparative analysis of the emission characteristics of large-area field-effect cathodes (LAFE) based on carbon nanotubes (CNTs) of various morphologies according to key parameters using a unique computerized technique. The work presents a description of a technology for creating various CNT arrays and their comprehensive structure characterization. All CNT arrays synthesized by the catalytic PECVD method on a silicon substrate showed a high degree of chemical purity under the presented technological conditions. In some cases, nanoisland films of Fe were used as a catalyst; in others, thin films of NiO were used, which were deposited on a silicon wafer by chemical vapor deposition (CVD) and atomic layer deposition (ALD), respectively. As a result of these studies, it turned out that an array with a thick CNT coating has good resistance to the action of strong electric fields, fairly good uniformity of distribution of emission centers, a fairly high selection current (2.88 mA/cm2 at 4.53 V/μm), and compliance with the normal current mode according to the “orthodox” test, which makes the morphology of such structures the most promising for further technological optimization of CNT-based cathodes for various practical applications.

Keywords

• atomic layer deposition
• nanoisland films
• direct-current plasma-enhanced chemical vapor deposition
• thin-layer structures
• carbon nanotubes
• field emission