A monolithic InP/SOI platform for integrated photonics

Zhao Yan; Yu Han; Liying Lin; Ying Xue; Chao Ma; Wai Kit Ng; Kam Sing Wong; Kei May Lau

doi:10.1038/s41377-021-00636-0

Light: Science & Applications (Sep 2021)

A monolithic InP/SOI platform for integrated photonics

Zhao Yan,
Yu Han,
Liying Lin,
Ying Xue,
Chao Ma,
Wai Kit Ng,
Kam Sing Wong,
Kei May Lau

Affiliations

Zhao Yan: Department of Electronic and Computer Engineering, Hong Kong University of Science and Technology, Clear Water Bay
Yu Han: Department of Electronic and Computer Engineering, Hong Kong University of Science and Technology, Clear Water Bay
Liying Lin: Department of Electronic and Computer Engineering, Hong Kong University of Science and Technology, Clear Water Bay
Ying Xue: Department of Electronic and Computer Engineering, Hong Kong University of Science and Technology, Clear Water Bay
Chao Ma: Department of Physics and William Mong Institute of Nano Science and Technology, Hong Kong University of Science and Technology, Clear Water Bay
Wai Kit Ng: Department of Physics and William Mong Institute of Nano Science and Technology, Hong Kong University of Science and Technology, Clear Water Bay
Kam Sing Wong: Department of Physics and William Mong Institute of Nano Science and Technology, Hong Kong University of Science and Technology, Clear Water Bay
Kei May Lau: Department of Electronic and Computer Engineering, Hong Kong University of Science and Technology, Clear Water Bay

DOI: https://doi.org/10.1038/s41377-021-00636-0
Journal volume & issue: Vol. 10, no. 1
pp. 1 – 10

Abstract

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A monolithic InP/SOI platform with dislocation-free, site-controlled and in-plane InP sub-micron wire and large dimension InP membrane array selectively grown on (001) SOI platform.

Published in Light: Science & Applications

ISSN: 2047-7538 (Online)
Publisher: Nature Publishing Group
Country of publisher: United Kingdom
LCC subjects: Technology: Engineering (General). Civil engineering (General): Applied optics. Photonics; Science: Physics: Optics. Light
Website: https://www.nature.com/lsa/

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